JPS6327426B2 - - Google Patents

Info

Publication number
JPS6327426B2
JPS6327426B2 JP60193419A JP19341985A JPS6327426B2 JP S6327426 B2 JPS6327426 B2 JP S6327426B2 JP 60193419 A JP60193419 A JP 60193419A JP 19341985 A JP19341985 A JP 19341985A JP S6327426 B2 JPS6327426 B2 JP S6327426B2
Authority
JP
Japan
Prior art keywords
cooling gas
bell gear
inner bell
nozzle
gear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60193419A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6254081A (ja
Inventor
Nobuo Kashiwagi
Shigeru Suzuki
Yoshihiro Myanomae
Kotei Iwata
Taketoshi Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP19341985A priority Critical patent/JPS6254081A/ja
Publication of JPS6254081A publication Critical patent/JPS6254081A/ja
Publication of JPS6327426B2 publication Critical patent/JPS6327426B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP19341985A 1985-09-02 1985-09-02 気相成長装置 Granted JPS6254081A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19341985A JPS6254081A (ja) 1985-09-02 1985-09-02 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19341985A JPS6254081A (ja) 1985-09-02 1985-09-02 気相成長装置

Publications (2)

Publication Number Publication Date
JPS6254081A JPS6254081A (ja) 1987-03-09
JPS6327426B2 true JPS6327426B2 (en]) 1988-06-02

Family

ID=16307650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19341985A Granted JPS6254081A (ja) 1985-09-02 1985-09-02 気相成長装置

Country Status (1)

Country Link
JP (1) JPS6254081A (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63270468A (ja) * 1987-04-27 1988-11-08 Hitachi Electronics Eng Co Ltd Ｃｖｄ薄膜形成装置
JPH0387372A (ja) * 1988-07-22 1991-04-12 Canon Inc 堆積膜形成方法
US20070187386A1 (en) * 2006-02-10 2007-08-16 Poongsan Microtec Corporation Methods and apparatuses for high pressure gas annealing
JP5409413B2 (ja) * 2010-01-26 2014-02-05 日本パイオニクス株式会社 Ｉｉｉ族窒化物半導体の気相成長装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6067364U (ja) * 1983-10-13 1985-05-13 富士通株式会社 反応管洗浄用アダプタ

Also Published As

Publication number Publication date
JPS6254081A (ja) 1987-03-09

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